Fims foup
WebY-axis(FOUP forward and back motion) ±0.1mm FOUP open operation;10sec. FOUP close operation;10sec. 300mm FOUP(SEMI E47.1,E62 compliant product) Suitable Product Specifications Presence of FOUP FOUP normal of position Prevents hand front being caught FOUP docking Wafer flying out FOUP Door detection Y-axis(FOUP forward and … WebMar 11, 2014 · Y-axis (FOUP: Forward/Retract): 70mm (SEMI Standard) Z-axis (FOUP door up/down): 375mm. 3.7 Repetition Precision. Y-axis (FOUP: Forward/Retract): ±0.1mm. Z …
Fims foup
Did you know?
WebFOUP normal position External View Detection Function Machine Capacity Repeat accuracy Operation time Y-axis(FOUP forward and back motion) ±0.1mm FOUP open … WebJan 15, 2024 · For the FOUP-to-wafer ammonia cross contamination, it was necessary to choose a different vehicle test. Si wafers and AlCu wafers were tested, however these …
WebAn Equipment Front End Module (EFEM) is the mainstay of semiconductor automation, shuffling silicon wafers between ultra-clean storage carriers and a variety of processing, measurement and testing systems. The robotics and peripheral equipment used in the semiconductor wafer processing environment work with unbelievable precision and … WebKT1628. KLA-Tencor 0068627-000, Ceramic End Effector. KT1582. ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items …
WebSEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Member Price: $130.00 Non-Member Price: $170.00 Volume (s): Equipment Automation … Web• holes for latch keys that lock the door to the FIMS interface when the door is unlatched from the FOUP • holes for registration pins • door presence sensing areas • bottom • 4 bottom conveyor rails (with the bottom of the front seal zone acting as the fourth rail and the rear rail optional) • 2 fork-lift pin holes
WebFinally, we establish the relationship between the sorption parameters of a polymer thin film and the potential contamination transfer from a FOUP whose main polymer material is similar. View
WebSEMI Standard E154 MECHANICAL INTERFACE SPECIFICATION FOR 450mm LOAD PORT FOUP Load Port TAS450 TYPE:A2 Features 1 2 3 Transmission-type mapping unit optionally available. 4 Obstacle detection sensors on Dock position. 5 FOUP/H-MAC presence / Placement detection. Supported FOUPs External View Full Height Full Width … thinkwise credit union online bankingWebSep 1, 2024 · Our automated, FIMS compatible SB300 FOSB provides a clean, secure environment for valuable 300 mm wafers as they move through numerous handling and transport processes. Ultrapure polycarbonate housing is dimensionally stable resulting in lower particle generation and outgassing. Molded-in wafer supports allow wafer location … thinkwise credit union routing numberWebOct 1, 2013 · This is a Federal computer system and is the property of the United States Government. It is for authorized use only. Users (authorized or unauthorized) have no … thinkwise credit union hoursWebAn automated transport system that travels on the overhead track and "directly" accesses the load port of the stocker or process equipment by the belt driven hoisting mechanism. "OHT" is the abbreviation for Overhead Hoist Transport. This is widely recognized as the main transport system for 300mm FAB and next generation FABs and is currently ... thinkwise credit union bankWebThe Entegris Spectra ™ FOUP is the culmination of significant research and development into materials, design and processes that can meet the stringent requirements defined by … thinkwise erpWebMoved Permanently. The document has moved here. thinkwise credit union rialto caWeb1. Purpose 1.1 This standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer carriers (including transport cassettes, process … thinkwise docs